| # | Famille | Produits | Statut | Template propose | Couv. | Responsable | Action |
|---|---|---|---|---|---|---|---|
| 1 | Four Points | 14 | Guide valide | {TYPE3} {OEM} {Variante} | 13/14 (93%) | MDC | Reclasser "Spare Needles" vers Probe Accessories. |
| 2 | Reflector Plates | 37 | Deviations a corriger | {OEM} {Equip} {Composant} [{Variante}] | 33/37 (89%) | MDC | Supprimer " — Reconditionne Niveau 1" · corriger "ASM reflector S Dam Light Front" (casse) · confirmer doublon ASM Reflector Spherical (0011-01 vs 0025-00). |
| 3 | Lapping & Coating | 43 | Deviations a corriger | {Composant} [{Spec}] [Repair I/II | Yttria | Reanodisation] | 36/43 (84%) | MDC + AXION | Ajouter Repair [I/II] aux 4 produits DRM Yttria sans suffixe · remplacer "Rep I/II" par "Repair I/II" (2 refs) · corriger "Dome Ceramic DPS Chamber Repair" (manque "I") · resoudre doublon "Support Shaft SV Door DPS2 Repair". |
| 4 | Probe tips | 13 | Deviations a corriger | PSE-{Suffixe} | 10/13 (77%) | MDC | Reclasser 825-12-GA et 2 nouveaux produits (Probe Assembly, Probe Holder) vers Probe Accessories — ce ne sont pas des pointes de sonde. |
| 5 | Alignment Laser | 5 | Guide valide | {Marque} {Composant} {Modele} [{Option}] | 5/5 (100%) | MDC | Guide aligne — pas de modification. |
| 6 | Four Point Probe Semi Automated | 5 | Guide valide | {CODE_CMT} [{Option}] | 4/5 (80%) | MDC + AXION | Harmoniser "SR-2000NW 7.2 Software update" → "CMT-SR2000NW 7.2 Software Upgrade" (correction en attente depuis v6). |
| 7 | Calibration of Temp Match Tool | 5 | Guide valide | {Composant} for {Equip} {Modele} [{Canaux}] | 4/5 (80%) | MDC | Corriger "Control Box Repair Temp Match Tool Centura 5200" → "Temp Match Tool Control Box Repair for Centura 5200" (correction en attente depuis v6). |
| 8 | Endura MCA ESC | 4 | Guide valide | Amat Endura {Type} {Composant} Repair [I/II | with/without {Spec}] | 4/4 (100%) | MDC + AXION | Formaliser ce guide dans la feuille Familles. |
| 9 | Amat Polyimide ESC | 2 | Guide valide | Amat Shell Assy {Diam}mm {Spec} | 2/2 (100%) | MDC | Guide aligne — pas de modification. |
| 10 | Wafertec Pump | 2 | Guide valide | Wafertec {Modele} Dispense Pump for Resist | 2/2 (100%) | MDC | Guide aligne — pas de modification. |
| 11 | LAM | 3 | A discuter | Heterogene | — | MDC | Clarifier perimetre LAM ESC vs Lapping & Coating — inchange depuis v6. |
| 12 | Mercury Probe | 11 | A discuter | 2 sous-groupes identifies | — | MDC | Proposer 2 guides distincts : Equipment (Mercury Probe {Size}) + Software/Services (CSM/Win {Option}). |
| 13 | Four Point Probe Manual & Test Units | 3 | A discuter | Incoherent avec guide Familles | 1/3 (33%) | MDC | Redefinir le guide "{TYPE3} {OEM}" ou le supprimer — inchange depuis v6. |
| Familles sans guide — Heterogeneite trop forte ou volume insuffisant pour pattern fiable | |||||||
| 14 | Filters, Lenses, Mirrors | 18 | Doublon corrige | — | — | MDC + AXION | Doublon Hamamatsu resolu. Action A-06-04 (groupe) toujours ouverte — heterogeneite persistante. |
| 15 | Calibration components | 12 | Sans guide | — | — | — | Heterogene (wafers, kits, pompes, microscopes) — pas de guide possible. |
| 16 | Cleaning | 5 | Sans guide | — | — | — | Perimetre trop large — envisager eclatement en sous-familles. |
| 17 | Others | 30 | Sans guide | — | — | — | +1 nouvelle ref. Heterogene par construction — pas de guide. |
| 18 | Probe Accessories | 3 | Sans guide | — | — | — | Volume insuffisant. Pourrait accueillir 825-12-GA, Spare Needles et les 2 nouveaux Probe tips si reclasses. |
| Familles a 1 produit : Parts for Steppers and Scanners · Heat Exchangers · RTP Lamp Houses · Quiet Chuck Hot Chuck Wafer Prober · AMAT Chucks (NEW) · Road Freight on Pallet (NEW) — pas de guide possible. | |||||||
| Ref | Description courte | Conformite |
|---|---|---|
| MDC-SPA-37-0001-00 | CAR KLA B | Conforme |
| MDC-SPA-37-0003-00 | CAR KLA A | Conforme |
| MDC-SPA-37-0004-00 | CAR KLA H | Conforme |
| MDC-SPA-37-0005-00 | CAR KLA C | Conforme |
| MDC-SPA-37-0006-00 | CAR KLA D | Conforme |
| MDC-SPA-37-0010-00 | CYL JDL 500 | Conforme |
| MDC-SPA-37-0011-00 | CAR CDE B | Conforme |
| MDC-SPA-37-0012-00 | CAR AIT E | Conforme |
| MDC-SPA-37-0021-00 | CAR CDE A | Conforme |
| MDC-SPA-37-0039-00 | CYL JDL A | Conforme |
| MDC-SPA-37-0040-00 | CYL JDL B | Conforme |
| MDC-SPA-37-0041-00 | CYL JDL C | Conforme |
| MDC-SPA-37-0042-00 | CYL JDL D | Conforme |
| MDC-SPA-37-0002-00 | Spare Needles | Hors guide Reclasser vers Probe Accessories |
{OEM} {Composant} {Variante} — confirme et elargi ici.ASM Reflector S Dam Light Front{Composant} [{Spec}] Repair — a mettre a jour pour inclure I/II et Yttria.Liner Lower 300mm DPS II Repair Yttria| Ref | Description courte | Conformite |
|---|---|---|
| MDC-SPA-33-0001-01 | Electrode Upper P-Y2 (DRM2) Repair | Conforme |
| MDC-SPA-33-0003-01 | Liner Cath Super E Repair | Conforme |
| MDC-SPA-33-0004-01 | Liner Wall (slitdoor) Super E Repair | Conforme |
| MDC-SPA-33-0005-01 | Door Slit Super E Repair | Conforme |
| MDC-SPA-33-0008-01 | Plate Gas Distribution 0.5 mm Repair | Conforme |
| MDC-SPA-33-0009-01 | Ring Isolation Repair | Conforme |
| MDC-SPA-33-0010-01 | Center Gas Baffle Repair | Conforme |
| MDC-SPA-33-0011-01 | Electrode Grounded Repair | Conforme |
| MDC-SPA-33-0026-01 | DPS Metal Upper Chamber Y203 Repair I | Ecart mineur Y203 — clarifier si identique a Yttria (Y₂O₃) |
| MDC-SPA-33-0026-02 | DPS Metal Upper Chamber Y203 Repair II | Ecart mineur Y203 — idem. "Full" supprime (correction v7 appliquee) |
| MDC-SPA-33-0017-01 | Tube External Tapered Repair | Conforme |
| MDC-SPA-33-0018-01 | Base Bracket Bellow MTG SV Door Repair | Conforme |
| MDC-SPA-33-0019-01 | Cover Bellow DRM Yttria | Ecart — suffixe Repair manquant Cover Bellow DRM Yttria Repair I (ou II) |
| MDC-SPA-33-0021-02 | Baffle Plate DRM Yttria | Ecart — suffixe Repair manquant Baffle Plate DRM Yttria Repair I (ou II) |
| MDC-SPA-33-0022-01 | Depo Shield DRM Yttria | Ecart — suffixe Repair manquant Depo Shield DRM Yttria Repair I (ou II) |
| MDC-SPA-33-0023-01 | Depo Shield Window DRM Yttria | Ecart — suffixe Repair manquant Depo Shield Window DRM Yttria Repair I (ou II) |
| MDC-SPA-33-0024-01 | Liner Lower 300mm DPS II Repair | Conforme |
| MDC-SPA-33-0024-02 | Liner Lower 300mm DPS II Repair — Yttria | Ecart mineur Separator " — " non conforme Liner Lower 300mm DPS II Repair Yttria |
| MDC-SPA-33-0025-01 | Support Shaft SV Door DPS2 Repair | Doublon — meme description que 0050-01 |
| MDC-SPA-33-0032-01 | Liner Chamber VAT 65 Repair I | Conforme (corrige v7) |
| MDC-SPA-33-0033-01 | Base Extension Repair I | Conforme |
| MDC-SPA-33-0033-02 | Base Extension Repair II | Conforme |
| MDC-SPA-35-0009-01 | Assy PVD Slit Valve Actuator Repair | Conforme |
| MDC-SPA-33-0035-01 | Dome Ceramic DPS Chamber Repair | Ecart — numerotation manquante Dome Ceramic DPS Chamber Repair I |
| MDC-SPA-33-0035-02 | Dome Ceramic DPS Chamber Repair II Yttria | Conforme |
| MDC-SPA-33-0036-01 | Liner Upper 300mm Repair | Conforme |
| MDC-SPA-33-0038-01 | Liner Cathode Liner 300mm DPS2 Yttria Repair I | Conforme (corrige v7) |
| MDC-SPA-33-0038-02 | Liner Cathode Liner 300mm DPS2 Repair II | Conforme |
| MDC-SPA-33-0039-01 | Chamber Upper Liner Cool Etch 300mm Rep I | Ecart — "Rep" au lieu de "Repair" Chamber Upper Liner Cool Etch 300mm Repair I |
| MDC-SPA-33-0039-02 | Chamber Upper Liner Cool Etch 300mm Yttria Rep II | Ecart — "Rep" au lieu de "Repair" Chamber Upper Liner Cool Etch 300mm Yttria Repair II |
| MDC-SPA-33-0040-01 | Seat, Anodized Aluminium 35mmx381mm Repair I | Conforme |
| MDC-SPA-33-0041-01 | Kit for VAT Valve Repair | Conforme |
| MDC-SPA-33-0042-01 | Door, SV Blocker Single Rod DPSII Repair I | Conforme |
| MDC-SPA-33-0042-02 | Door, SV Blocker Single Rod DPSII Yttria Repair | Ecart — numerotation Repair manquante Door, SV Blocker Single Rod DPSII Yttria Repair II |
| MDC-SPA-33-0043-01 | Electrode Lower Repair | Conforme |
| MDC-SPA-33-0044-01 | Baffle Pumping Repair | Conforme |
| MDC-SPA-33-0045-01 | Plate for Door Fusion Chamber Repair | Conforme |
| MDC-SPA-33-0046-01 | Spool Turbo/GV 300MM DPS II Repair | Conforme |
| MDC-SPA-33-0047-01 | Particule Trap DPS2 Reanodisation | Conforme (suffixe Reanodisation accepte) |
| MDC-SPA-33-0048-01 | Kit for Vat Valve LAM 2300 Repair I | Conforme |
| MDC-SPA-33-0049-02 | Dome Ceramic Plus Yttria Repair | Ecart — numerotation "II" manquante Dome Ceramic Plus Yttria Repair II |
| MDC-SPA-33-0050-01 | Support Shaft SV Door DPS2 Repair | Doublon — meme description que 0025-01 |
| MDC-SPA-33-0051-01 | Ring Bottom Gas Injection Repair | Conforme |
{CodePiece} — confirme par les donnees.| Ref | Description courte | Conformite |
|---|---|---|
| MDC-SPA-37-0024-00 | PSE-T | Conforme |
| MDC-SPA-37-0025-00 | PSE-GA | Conforme |
| MDC-SPA-37-0026-00 | PSE-SM | Conforme |
| MDC-SPA-37-0027-00 | PSE-SMS | Conforme |
| MDC-SPA-37-0028-00 | PSE-TB | Conforme |
| MDC-SPA-37-0029-00 | PSE-TC | Conforme |
| MDC-SPA-37-0030-00 | PSE-O | Conforme |
| MDC-SPA-37-0031-00 | PSE-S | Conforme |
| MDC-SPA-37-0032-00 | PSE-P | Conforme |
| MDC-SPA-37-0033-00 | PSE-BC | Conforme |
| MDC-SPA-37-0022-00 | 825-12-GA | Hors guide Code fabricant pur — reclasser Probe Accessories |
| MDC-SPA-37-0043-00 | Probe Assembly Standard Left/Right Tungsten CV Station | Mauvaise famille — NOUVEAU Assemblage de sonde, pas une pointe — reclasser Probe Accessories |
| MDC-SPA-37-0044-00 | Probe Holder Teflon Isolated | Mauvaise famille — NOUVEAU Support de sonde, pas une pointe — reclasser Probe Accessories |
{Marque} {Composant} {Modele} [{option}] — aligne.CMT-SR2000NW 7.2 Software Upgrade{Composant} for {Equip} {Modele} [{canaux}] — aligne.Temp Match Tool Control Box Repair for Centura 5200| Ref | Description courte | Conformite |
|---|---|---|
| MDC-SPA-35-0005-01 | Amat Endura LTA MCA Chuck Repair I | Conforme |
| MDC-SPA-35-0005-02 | Amat Endura LTA MCA Chuck Repair II | Conforme |
| MDC-SPA-35-0006-01 | Amat Endura MCA Heater Repair without changing bellow | Conforme |
| MDC-SPA-35-0006-02 | Amat Endura MCA Heater Repair with changing bellow | Conforme |
Amat Shell Assy {Diam}mm {Spec} — aligne. Inchange vs v6.Wafertec {Modele} Dispense Pump for Resist — aligne. Inchange vs v6.| Ref | Description courte |
|---|---|
| MDC-SPA-33-0006-01 | LAM ESC 8" Repair -PK2-EHPT-008 oxyde |
| MDC-SPA-33-0007-01 | LAM Assy Cap Electrode ESC 96PTX Cleaning |
| MDC-SPA-33-0031-01 | Chuck ESC 2300 Flex |
Three Function Mercury Probe {Diametre}{TYPE3} {OEM} {Variante} (identique a Four Points). Or les descriptions actuelles ne suivent pas ce pattern : "Multi-height Probe", "Resistivity Test Unit RM3000+", "Four Point Universal Probe" — aucune ne commence par un TYPE3.| Priorite | Action | Famille | Responsable |
|---|---|---|---|
| Critique | Verifier le doublon "Support Shaft SV Door DPS2 Repair" — MDC-SPA-33-0025-01 (SEQ 0025) et MDC-SPA-33-0050-01 (SEQ 0050) ont des descriptions identiques et des descriptions longues vides. Confirmer si 2 pieces distinctes ou duplication — corriger la description de l'une ou supprimer l'entree en double. | Lapping & Coating | MDC |
| Haute | Ajouter le suffixe Repair + numerotation (I ou II) aux 4 produits DRM Yttria sans process : Cover Bellow DRM Yttria · Baffle Plate DRM Yttria · Depo Shield DRM Yttria · Depo Shield Window DRM Yttria | Lapping & Coating | MDC |
| Haute | Ajouter la numerotation manquante : "Dome Ceramic DPS Chamber Repair" → "Repair I" · "Dome Ceramic Plus Yttria Repair" → "Repair II" · "Door, SV Blocker Single Rod DPSII Yttria Repair" → "Repair II" | Lapping & Coating | MDC |
| Haute | Remplacer "Rep I/II" par "Repair I/II" sur Chamber Upper Liner Cool Etch 300mm (MDC-SPA-33-0039-01 et -02) | Lapping & Coating | MDC |
| Haute | Retirer le suffixe " — Reconditionne Niveau 1" des variantes reconditionnees Reflector Plates (MDC-SPA-34-0027-01 et -0028-01) — action en attente depuis v6 | Reflector Plates | MDC |
| Haute | Reclasser MDC-SPA-37-0043-00 et MDC-SPA-37-0044-00 de Probe tips vers Probe Accessories (assemblage et support de sonde, pas des pointes) | Probe tips | MDC |
| Normale | Corriger casse "ASM reflector S Dam Light Front" → "ASM Reflector S Dam Light Front" (MDC-SPA-34-0029-01) | Reflector Plates | MDC |
| Normale | Verifier "ASM Reflector Spherical" — MDC-SPA-34-0011-01 (Reconditionne) et MDC-SPA-34-0025-00 (Neuf) ont des SEQ differents. Confirmer si 2 pieces distinctes ou paire N/R — adapter la description si besoin | Reflector Plates | MDC |
| Normale | Reclasser "Spare Needles" (MDC-SPA-37-0002-00) de Four Points vers Probe Accessories — action en attente depuis v6 | Four Points | MDC |
| Normale | Harmoniser "CMT-SR2000NW 7.2 Software update" → "CMT-SR2000NW 7.2 Software Upgrade" — action en attente depuis v6 | Four Point Probe Semi Automated | MDC |
| Normale | Corriger l'ordre de "Temp Match Tool Centura 5200 Control Box Repair" → "Temp Match Tool Control Box Repair for Centura 5200" — action en attente depuis v6 | Calibration of Temp Match Tool | MDC |
| Backlog | Verifier "ASM reflector 825-12-GA" (Probe tips) — si probe holder OEM, reclasser vers Probe Accessories | Probe tips | MDC |
| Backlog | Formaliser le guide Endura MCA ESC dans la feuille Familles · Formaliser le guide Four Point Probe Semi Automated — en attente depuis v6 | Endura MCA ESC / 4PP Semi | AXION |
| Backlog | Clarifier la famille LAM (fusion Lapping & Coating ?) · Definir 2 guides Mercury Probe (Equipment / Software+Services) · Redefinir ou supprimer le guide Four Point Probe Manual | LAM / Mercury / 4PP Manual | MDC + AXION |